Plasma cleaning
Vacuum plasma cleaning equipment
VP-C120
Vacuum plasma is a type of plasma generated by radio frequency electromagnetic fields acting on gas molecules in a vacuum environment. Gas molecules are excited and ionized to form a large number of charged particles, such as electrons, ions and free radicals. These charged particles form chemical and physical reactions under the action of electromagnetic fields, thereby cleaning, activating and modifying the product surface.
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Product Value
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Core functions
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Applicable scenarios
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Product parameters
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Recommended products
Product Value
Avoid material oxidation damage and improve surface energy
Supports multi-gas processes and meets stringent industry standards
No chemical solvents required, reducing usage costs
Core functions
Efficient cleaning: All-round cleaning to deeply remove pollutants.
Surface activation: Enhance hydrophilicity, improve wettability and bonding properties.
Improve surface energy: enhance surface bonding, improve stability and life.
Special-shaped cleaning: Comprehensively clean surfaces with complex shapes to improve efficiency.
Environmentally friendly formula: environmentally friendly and non-toxic, safe and pollution-free.
Applicable scenarios
Printing pre-processing
Bonding pretreatment
Spraying pretreatment
Welding pretreatment
Coating pretreatment
Dispensing pretreatment
Product parameters
| Dimensions | W*D*H: 1030mm*1281mm*1632mm Exterior paint |
| Chamber size | W*D*H: 430mm*434mm*653mm-120L / 420mm -80L 304 stainless steel (optional) |
| Electrode Plate | W*D: 335mm*350mm, 14 layers placed horizontally Customized electrode structure |
| External power supply | AC-380V±15%, 50HZ three-phase five-wire system |
| Equipment power | Rated power ≤5KW |
| Control System | Independent research and development, using PLC and touch screen to combine each other, manual and automatic switching and interlocking; operation and use permissions are hierarchically controlled Siemens PLC + Weiluntong touch screen |
| Vacuum system | Roots vacuum pump (BSJ70L) + rotary vane vacuum pump (BSV60) 80L/120L optional |
| Vacuum detection system | Pirani Vacuum Gauge INFICON |
| Vacuum supply part | 6mm stainless steel pipe + brand hose + digital pressure gauge 304 stainless steel |
| Gas control system | Solenoid valve + mass flow controller 0-200ml/min (sccm) SevenStar |
| RF System | RF power supply + vacuum capacitor matching 1000W/500W RISHIGE 80L/120L optional |
| Vacuum exhaust system | Wire tube lead-out machine, optional filter |
| Vacuum Breaking System | Solenoid valve + air control valve control Vacuum breaking time ≤ 30S SMC |
| Equipment capacity | Depends on the product, single cleaning ≤ 8Min |
| Working vacuum | 5-50Pa |
| Operation Method | Manual loading and unloading, one-button start and stop, can store multiple groups of recipes, recipes can be called at will |
| Other electrical components | Well-known domestic and foreign brands Schneider, etc. |
| Site Requirements | TEMP≤45℃，RH（35-75%） |
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